Optical Scatterometry of Subwavelength Diffraction Gratings: Neural Networks Approach

I. Kallioniemi, J. Saarinen, E. Oja

    Research output: Contribution to journalArticleScientificpeer-review

    37 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)5830-5835
    JournalApplied Optics
    Volume37
    Issue number25
    Publication statusPublished - 1998
    MoE publication typeA1 Journal article-refereed

    Keywords

    • diffraction gratings
    • neural networks
    • scatterometry

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