Optical properties of atomic layer deposited materials and their application in silicon waveguides

Tapani Alasaarela, Jussi Hiltunen, Amit Khanna, Antti Säynätjoki, Ari Tervonen, Seppo Honkanen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationOptical Components and Materials VII, Photonics West, San Francisco, CA, USA, January 23-28, Paper 7598-11 (2010)
    Publication statusPublished - 2010
    MoE publication typeA4 Article in a conference publication

    Publication series

    NameProceedings of SPIE
    ISSN (Print)0277-786X

    Cite this