@inproceedings{2fed6ea01d624158aa1667c104a7f0b6,
title = "Optical metrology of thin films using high accuracy spectrophotometric measurements with oblique angles of incidence",
keywords = "optical coatings, refractive index, optical coatings, refractive index, optical coatings, refractive index",
author = "S. Nevas and F. Manoocheri and E. Ikonen and A. Tikhonravov and M. Kokarev and M. Trubetskov",
year = "2003",
language = "English",
booktitle = "Optical Systems Design 2003, Saint-Etienne, France, September 2003",
publisher = "SPIE",
address = "United States",
}