Optical metrology of thin films using high accuracy spectrophotometric measurements with oblique angles of incidence

S. Nevas, F. Manoocheri, E. Ikonen, A. Tikhonravov, M. Kokarev, M. Trubetskov

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationOptical Systems Design 2003, Saint-Etienne, France, September 2003
    PublisherSPIE
    Publication statusPublished - 2003
    MoE publication typeA4 Article in a conference publication

    Keywords

    • optical coatings
    • refractive index

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