Optical metrology of thin films using high accuracy spectrophotometric measurements with oblique angles of incidence

S. Nevas, F. Manoocheri, E. Ikonen, A. Tikhonravov, M. Kokarev, M. Trubetskov

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	Optical Systems Design 2003, Saint-Etienne, France, September 2003
Publisher	SPIE
Publication status	Published - 2003
MoE publication type	A4 Article in a conference publication

Keywords

@inproceedings{2fed6ea01d624158aa1667c104a7f0b6,

title = "Optical metrology of thin films using high accuracy spectrophotometric measurements with oblique angles of incidence",

keywords = "optical coatings, refractive index, optical coatings, refractive index, optical coatings, refractive index",

author = "S. Nevas and F. Manoocheri and E. Ikonen and A. Tikhonravov and M. Kokarev and M. Trubetskov",

year = "2003",

language = "English",

booktitle = "Optical Systems Design 2003, Saint-Etienne, France, September 2003",

publisher = "SPIE",

address = "United States",

}

TY - GEN

T1 - Optical metrology of thin films using high accuracy spectrophotometric measurements with oblique angles of incidence

AU - Nevas, S.

AU - Manoocheri, F.

AU - Ikonen, E.

AU - Tikhonravov, A.

AU - Kokarev, M.

AU - Trubetskov, M.

PY - 2003

Y1 - 2003

KW - optical coatings

KW - refractive index

KW - optical coatings

KW - refractive index

KW - optical coatings

KW - refractive index

M3 - Conference contribution

BT - Optical Systems Design 2003, Saint-Etienne, France, September 2003

PB - SPIE

ER -