Optical metrology of thin films using high-accuracy spectro-photometric measurements with oblique angles of incidence

S. Nevas, F. Manoocheri, E. Ikonen, A. Tikhonravov, M. Kokarev, M. Trubetskov

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)234-242
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 2004
MoE publication typeA1 Journal article-refereed


  • characterization
  • polarization
  • refractive index
  • spectophotometric measurements
  • thin film

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