@article{e1454e2591d44b5c97a35e8aea15e9d4,
title = "Optical metrology of thin films using high-accuracy spectro-photometric measurements with oblique angles of incidence",
keywords = "characterization, polarization, refractive index, spectophotometric measurements, thin film, characterization, polarization, refractive index, spectophotometric measurements, thin film, characterization, polarization, refractive index, spectophotometric measurements, thin film",
author = "S. Nevas and F. Manoocheri and E. Ikonen and A. Tikhonravov and M. Kokarev and M. Trubetskov",
year = "2004",
doi = "10.1117/12.512700",
language = "English",
volume = "5250",
pages = "234--242",
journal = "SPIE CONFERENCE PROCEEDINGS",
issn = "0277-786X",
publisher = "SPIE - The International Society for Optical Engineering",
}