Optical interferometric detection of a mechanical silicon oscillator

Research output: Working paper › Professional

Original language	English
Place of Publication	Channes
Pages	430-438
Publication status	Published - 2002
MoE publication type	D4 Published development or research report or study

Name	DTIP 2002 of MEMS and MOEMS, Mandelieu, France, May 5-8, 2002

Keywords

@techreport{1ebdbef8a9424bd099b9d78d16faaf60,

title = "Optical interferometric detection of a mechanical silicon oscillator",

keywords = "oscillator, oscillator, oscillator",

author = "Kaisa Nera and Ossi Hahtela and Sami Franssila and Ilkka Tittonen",

year = "2002",

language = "English",

series = "DTIP 2002 of MEMS and MOEMS, Mandelieu, France, May 5-8, 2002",

pages = "430--438",

type = "WorkingPaper",

}

TY - UNPB

T1 - Optical interferometric detection of a mechanical silicon oscillator

AU - Nera, Kaisa

AU - Hahtela, Ossi

AU - Franssila, Sami

AU - Tittonen, Ilkka

PY - 2002

Y1 - 2002

KW - oscillator

M3 - Working paper

T3 - DTIP 2002 of MEMS and MOEMS, Mandelieu, France, May 5-8, 2002

SP - 430

EP - 438

BT - Optical interferometric detection of a mechanical silicon oscillator

CY - Channes

ER -