Optical Interference Lithography Using Azobenzene-Functionalized Polymers for Micro- and Nanopatterning of Silicon

A. Kravchenko, A. Shevchenko, Victor Ovchinnikov, A. Priimagi, M. Kaivola

Research output: Contribution to journalArticleScientificpeer-review

90 Citations (Scopus)
Original languageEnglish
Pages (from-to)4174-4177
Number of pages4
JournalAdvanced Materials
Volume23
Issue number36
DOIs
Publication statusPublished - 22 Sep 2011
MoE publication typeA1 Journal article-refereed

Keywords

  • azobenzene
  • lithography
  • nanopatterning
  • surface-relief grating

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