Optical Coating Fabricated by Atomic Layer Deposition

Päivi Sievilä, Nikolai Chekurov, Ossi Kimmelma, Ilkka Tittonen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationThe XLII Annual Conference of the Finnish Physical Society, Turku 2008.
    Publication statusPublished - 2008
    MoE publication typeA4 Article in a conference publication


    • ALD
    • Coating
    • Optical

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