Optical Coating Fabricated by Atomic Layer Deposition

Päivi Sievilä, Nikolai Chekurov, Ossi Kimmelma, Ilkka Tittonen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	The XLII Annual Conference of the Finnish Physical Society, Turku 2008.
Publication status	Published - 2008
MoE publication type	A4 Article in a conference publication

Keywords

@inproceedings{bdae974b8afc4b649fe56a96343ec1ea,

title = "Optical Coating Fabricated by Atomic Layer Deposition",

keywords = "ALD, Coating, Optical, ALD, Coating, Optical, ALD, Coating, Optical",

author = "P{\"a}ivi Sievil{\"a} and Nikolai Chekurov and Ossi Kimmelma and Ilkka Tittonen",

year = "2008",

language = "English",

booktitle = "The XLII Annual Conference of the Finnish Physical Society, Turku 2008.",

}

TY - GEN

T1 - Optical Coating Fabricated by Atomic Layer Deposition

AU - Sievilä, Päivi

AU - Chekurov, Nikolai

AU - Kimmelma, Ossi

AU - Tittonen, Ilkka

PY - 2008

Y1 - 2008

KW - ALD

KW - Coating

KW - Optical

KW - ALD

KW - Coating

KW - Optical

KW - ALD

KW - Coating

KW - Optical

M3 - Conference contribution

BT - The XLII Annual Conference of the Finnish Physical Society, Turku 2008.

ER -