Optical and structural properties of SiOx films grown by molecular beam deposition: Effect of the Si concentration and annealing temperature

Timur Nikitin, Rama Velagapudi, Jani Sainio, Jouko Lahtinen, Markku Räsänen, Sergei Novikov, Leonid Khriachtchev

Research output: Contribution to journalArticleScientificpeer-review

18 Citations (Scopus)
Original languageEnglish
JournalJournal of Applied Physics
Issue number112
DOIs
Publication statusPublished - 2012
MoE publication typeA1 Journal article-refereed

Keywords

  • Silicon nanocrystals, Raman, X-ray photoelectron
  • spectroscopy

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