Optical and structural properties of silicon-rich silicon oxide films: Comparison of ion implantation and molecular beam deposition methods

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Original languageEnglish
Pages (from-to)2176-2181
JournalPHYSICA STATUS SOLIDI A: APPLICATIONS AND MATERIALS SCIENCE
Volume208
Issue number9
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed

    Research areas

  • absorption, photoluminescence, Raman spectroscopy, silicon nanocrystals

ID: 877246