@article{9943ab376d7642fa838ab2a0bc524167,
title = "Optical and structural properties of silicon-rich silicon oxide films: Comparison of ion implantation and molecular beam deposition methods",
keywords = "absorption, photoluminescence, Raman spectroscopy, silicon nanocrystals, absorption, photoluminescence, Raman spectroscopy, silicon nanocrystals, absorption, photoluminescence, Raman spectroscopy, silicon nanocrystals",
author = "T. Nikitin and K. Aitola and Serguei Novikov and M. R{\"a}s{\"a}nen and R. Velagapudi and J. Sainio and J. Lahtinen and K. Mizohata and T. Ahlgren and L. Khriachtchev",
year = "2011",
doi = "10.1002/pssa.201127028",
language = "English",
volume = "208",
pages = "2176--2181",
journal = "PHYSICA STATUS SOLIDI A: APPLICATIONS AND MATERIALS SCIENCE",
issn = "1862-6300",
publisher = "Wiley",
number = "9",
}