@article{1b412e22498643b89d75d11b6fdf076b,
title = "One-step fabrication of polymer components for microphotonics by gray scale electron beam lithography",
keywords = "3D polymer waveguides grating couplers, gray scale electron beam lithography, lag effect, 3D polymer waveguides grating couplers, gray scale electron beam lithography, lag effect, 3D polymer waveguides grating couplers, gray scale electron beam lithography, lag effect",
author = "L. Dong and S. Popov and A.T. Friberg",
year = "2011",
doi = "10.2971/jeos.2011.11010",
language = "English",
volume = "6",
journal = "Journal of the European Optical Society: Rapid Publications",
issn = "1990-2573",
publisher = "EDP Sciences",
}