One-step fabrication of polymer components for microphotonics by gray scale electron beam lithography

L. Dong, S. Popov, A.T. Friberg

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)
Original languageEnglish
JournalJournal of the European Optical Society: Rapid Publications
Volume6
DOIs
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed

Keywords

  • 3D polymer waveguides grating couplers
  • gray scale electron beam lithography
  • lag effect

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