One-dimensional photonic crystal nanobeam cavities

J. Hendrickson*, A. Homyk, A. Scherer, T. Alasaarela, A. Säynätjoki, S. Honkanen, B. C. Richards, J. Y. Kim, Y. H. Lee, Ricky Gibson, M. Gehl, J. D. Olitzky, S. Zandbergen, H. M. Gibbs, G. Khitrova

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review


    The design, fabrication, and characterization of passive one-dimensional photonic crystal nanobeam cavities is presented. Silicon is chosen as the material system due to its ability to provide very high quality factors, a necessary prerequisite for solid state cavity quantum electrodynamics experiments, and its applicability to large scale hybrid device integration. Use of atomic layer deposition to conformally coat silicon on insulator nanobeam cavities with 20nm of Al2O3 is shown to increase quality factors by an average of 35% and a maximum of 124%.

    Original languageEnglish
    Title of host publicationQuantum Optics with Semiconductor Nanostructures
    PublisherElsevier Ltd.
    Number of pages26
    ISBN (Print)9780857092328
    Publication statusPublished - 2012
    MoE publication typeA3 Part of a book or another research book


    • Atomic layer deposition
    • Microcavities
    • Nanophotonics
    • Photonic crystals

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