The design, fabrication, and characterization of passive one-dimensional photonic crystal nanobeam cavities is presented. Silicon is chosen as the material system due to its ability to provide very high quality factors, a necessary prerequisite for solid state cavity quantum electrodynamics experiments, and its applicability to large scale hybrid device integration. Use of atomic layer deposition to conformally coat silicon on insulator nanobeam cavities with 20nm of Al2O3 is shown to increase quality factors by an average of 35% and a maximum of 124%.
|Title of host publication||Quantum Optics with Semiconductor Nanostructures|
|Number of pages||26|
|Publication status||Published - 2012|
|MoE publication type||A3 Part of a book or another research book|
- Atomic layer deposition
- Photonic crystals