On the manifestation of phosphorus-vacancy complexes in epitaxial Si:P films

Sathish Kumar Dhayalan*, Jiri Kujala, Jonatan Slotte, Geoffrey Pourtois, Eddy Simoen, Erik Rosseel, Andriy Hikavyy, Yosuke Shimura, Serena Iacovo, Andre Stesmans, Roger Loo, Wilfried Vandervorst

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

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