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On the manifestation of phosphorus-vacancy complexes in epitaxial Si:P films
Sathish Kumar Dhayalan*, Jiri Kujala, Jonatan Slotte, Geoffrey Pourtois, Eddy Simoen, Erik Rosseel, Andriy Hikavyy, Yosuke Shimura, Serena Iacovo, Andre Stesmans, Roger Loo, Wilfried Vandervorst
*Corresponding author for this work
Research output: Contribution to journal › Article › Scientific › peer-review
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