On the Early History of ALD: Molecular Layering

Jaan Aarik; Andrew R. Akbashev; David Cameron; Jeffrey Elam; Simon Elliott; Gloria Gottardi; Kestutis Grigoras; Yury Koshtyal; Marja-Leena Kääriäinen; Tommi Kääriäinen; Anatoly Malkov; Anatoly Malygin; Jyrki Molarius; Juha Nikkola; Henrik Pedersen; Riikka L. Puurunen; Robin H. A. Ras; Fred Roozeboom; Hele Savin; Thomas E. Seidel; Jonas Sundqvist; J.Ruud van Ommen; Oili Ylivaara

On the Early History of ALD: Molecular Layering

Jaan Aarik, Andrew R. Akbashev, David Cameron, Jeffrey Elam, Simon Elliott, Gloria Gottardi, Kestutis Grigoras, Yury Koshtyal, Marja-Leena Kääriäinen, Tommi Kääriäinen, Anatoly Malkov, Anatoly Malygin, Jyrki Molarius, Juha Nikkola, Henrik Pedersen, Riikka L. Puurunen, Robin H. A. Ras, Fred Roozeboom, Hele Savin, Thomas E. SeidelJonas Sundqvist, J.Ruud van Ommen, Oili Ylivaara

Electron Physics Group (EPG)

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	14th International Conference on Atomic Layer Deposition, Kyoto, Japan, June 15-18, 2014
Publication status	Published - 2014
MoE publication type	A4 Conference publication

Cite this

Aarik, J., Akbashev, A. R., Cameron, D., Elam, J., Elliott, S., Gottardi, G., Grigoras, K., Koshtyal, Y., Kääriäinen, M.-L., Kääriäinen, T., Malkov, A., Malygin, A., Molarius, J., Nikkola, J., Pedersen, H., Puurunen, R. L., Ras, R. H. A., Roozeboom, F., Savin, H., ... Ylivaara, O. (2014). On the Early History of ALD: Molecular Layering. In 14th International Conference on Atomic Layer Deposition, Kyoto, Japan, June 15-18, 2014

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title = "On the Early History of ALD: Molecular Layering",

author = "Jaan Aarik and Akbashev, {Andrew R.} and David Cameron and Jeffrey Elam and Simon Elliott and Gloria Gottardi and Kestutis Grigoras and Yury Koshtyal and Marja-Leena K{\"a}{\"a}ri{\"a}inen and Tommi K{\"a}{\"a}ri{\"a}inen and Anatoly Malkov and Anatoly Malygin and Jyrki Molarius and Juha Nikkola and Henrik Pedersen and Puurunen, {Riikka L.} and Ras, {Robin H. A.} and Fred Roozeboom and Hele Savin and Seidel, {Thomas E.} and Jonas Sundqvist and {van Ommen}, J.Ruud and Oili Ylivaara",

year = "2014",

language = "English",

booktitle = "14th International Conference on Atomic Layer Deposition, Kyoto, Japan, June 15-18, 2014",

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Aarik, J, Akbashev, AR, Cameron, D, Elam, J, Elliott, S, Gottardi, G, Grigoras, K, Koshtyal, Y, Kääriäinen, M-L, Kääriäinen, T, Malkov, A, Malygin, A, Molarius, J, Nikkola, J, Pedersen, H, Puurunen, RL , Ras, RHA, Roozeboom, F, Savin, H, Seidel, TE, Sundqvist, J, van Ommen, JR & Ylivaara, O 2014, On the Early History of ALD: Molecular Layering. in 14th International Conference on Atomic Layer Deposition, Kyoto, Japan, June 15-18, 2014.

TY - GEN

T1 - On the Early History of ALD: Molecular Layering

AU - Aarik, Jaan

AU - Akbashev, Andrew R.

AU - Cameron, David

AU - Elam, Jeffrey

AU - Elliott, Simon

AU - Gottardi, Gloria

AU - Grigoras, Kestutis

AU - Koshtyal, Yury

AU - Kääriäinen, Marja-Leena

AU - Kääriäinen, Tommi

AU - Malkov, Anatoly

AU - Malygin, Anatoly

AU - Molarius, Jyrki

AU - Nikkola, Juha

AU - Pedersen, Henrik

AU - Puurunen, Riikka L.

AU - Ras, Robin H. A.

AU - Roozeboom, Fred

AU - Savin, Hele

AU - Seidel, Thomas E.

AU - Sundqvist, Jonas

AU - van Ommen, J.Ruud

AU - Ylivaara, Oili

PY - 2014

Y1 - 2014

M3 - Conference article in proceedings

BT - 14th International Conference on Atomic Layer Deposition, Kyoto, Japan, June 15-18, 2014

ER -