On the Early History of ALD: Molecular Layering

Jaan Aarik, Andrew R. Akbashev, David Cameron, Jeffrey Elam, Simon Elliott, Gloria Gottardi, Kestutis Grigoras, Yury Koshtyal, Marja-Leena Kääriäinen, Tommi Kääriäinen, Anatoly Malkov, Anatoly Malygin, Jyrki Molarius, Juha Nikkola, Henrik Pedersen, Riikka L. Puurunen, Robin H. A. Ras, Fred Roozeboom, Hele Savin, Thomas E. SeidelJonas Sundqvist, J.Ruud van Ommen, Oili Ylivaara

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publication14th International Conference on Atomic Layer Deposition, Kyoto, Japan, June 15-18, 2014
Publication statusPublished - 2014
MoE publication typeA4 Article in a conference publication

Cite this

Aarik, J., Akbashev, A. R., Cameron, D., Elam, J., Elliott, S., Gottardi, G., ... Ylivaara, O. (2014). On the Early History of ALD: Molecular Layering. In 14th International Conference on Atomic Layer Deposition, Kyoto, Japan, June 15-18, 2014