On-Chip Digitally Tunable High Voltage Generator for Electrostatic Control of Micromechanical Devices

Lasse Aaltonen, Mikko Saukoski, Kari Halonen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    9 Citations (Scopus)
    Original languageEnglish
    Title of host publicationIEEE Custom Integrated Circuits (CICC) 2006, San Jose, CA, USA, 10-13, September 2006
    Publication statusPublished - 2006
    MoE publication typeA4 Article in a conference publication


    • Digital
    • High-voltage
    • MEMS

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