Octree-search Kinetic Monte Carlo

M.A. Gosalvez, Y. Xing, Kazuo Sato, Risto M. Nieminen

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)
Original languageEnglish
Pages (from-to)64-68
JournalSensors and Actuators A: Physical
VolumeA159
Issue number1
DOIs
Publication statusPublished - 2010
MoE publication typeA1 Journal article-refereed

Keywords

  • etching
  • growth
  • kinetic Monte Carlo
  • K-level search
  • N-fold method
  • octree
  • surface processing

Cite this