Observation of misfit dislocation strain-induced surface features for a Si/Ge-Si heterostructure using total reflection x-ray topography

P.J. McNally, G. Dilliway, J.M. Bonar, A. Willoughby, T. Tuomi, R. Rantamäki, A.N. Danilewsky, D. Lowney

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)s. R1-R3
    JournalPhysica Status Solidi A
    Issue number180
    Publication statusPublished - 2000
    MoE publication typeA1 Journal article-refereed

    Keywords

    • dislocations
    • silicon-germanium
    • strain
    • synchrotron x-ray topography

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