Numerical and Compact Modelling of Squeeze-film Damping in RF MEMS Resonator

Timo Veijola, Anu Lehtovuori

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    3 Citations (Scopus)
    Original languageEnglish
    Title of host publicationDesign, Test, Integration and Packaging of MEMS/MOEMS, Nice, France, 9-11 April 2008
    Place of PublicationNice, France
    PublisherDTIP 2008
    Pages222-228
    ISBN (Print)978-2-35500-006-5
    Publication statusPublished - 2008
    MoE publication typeA4 Article in a conference publication

    Keywords

    • squeeze-film, trapped gas, oscillatory flow, RF MEMS, damping

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