@inproceedings{16f0e47b234c468c994beb5b1a9bd845,
title = "Numerical and Compact Modelling of Squeeze-film Damping in RF MEMS Resonator",
keywords = "squeeze-film, trapped gas, oscillatory flow, RF MEMS, damping, squeeze-film, trapped gas, oscillatory flow, RF MEMS, damping, squeeze-film, trapped gas, oscillatory flow, RF MEMS, damping",
author = "Timo Veijola and Anu Lehtovuori",
year = "2008",
language = "English",
isbn = "978-2-35500-006-5",
pages = "222--228",
booktitle = "Design, Test, Integration and Packaging of MEMS/MOEMS, Nice, France, 9-11 April 2008",
publisher = "EDA Publishing Association",
address = "Egypt",
}