Nucleation and Conformality of Iridium and Iridium Oxide Thin Films Grown by Atomic Layer Deposition

Miika Mattinen*, Jani Hämäläinen, Feng Gao, Pasi Jalkanen, Kenichiro Mizohata, Jyrki Räisänen, Riikka L. Puurunen, Mikko Ritala, Markku Leskelä

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

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