Nuclear reaction analysis for H, Li, Be, B, C, N, O and F with an RBS check

W. A. Lanford*, M. Parenti, B. J. Nordell, M. M. Paquette, A. N. Caruso, M. Mäntymäki, J. Hämäläinen, M. Ritala, K. B. Klepper, V. Miikkulainen, O. Nilsen, W. Tenhaeff, N. Dudney, D. Koh, S. K. Banerjee, E. Mays, J. Bielefeld, S. W. King

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

26 Citations (Scopus)


15N nuclear reaction analysis (NRA) for H is combined with 1.2 MeV deuteron (D) NRA which provides a simultaneous analysis for Li, Be, B, C, N, O and F. The energy dependence of the D NRA has been measured and used to correct for the D energy loss in film being analyzed. A 2 MeV He RBS measurement is made. Film composition is determined by a self-consistent analysis of the light element NRA data combined with an RBS analysis for heavy elements. This composition is used to simulate, with no adjustable parameters, the complete RBS spectrum. Comparison of this simulated RBS spectrum with the measured spectrum provides a powerful check of the analysis.

Original languageEnglish
Pages (from-to)211-215
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Publication statusPublished - 15 Mar 2016
MoE publication typeA1 Journal article-refereed


  • Electronic materials
  • Light elements
  • NRA

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