Nuclear reaction analysis for H, Li, Be, B, C, N, O and F with an RBS check

W. A. Lanford; M. Parenti; B. J. Nordell; M. M. Paquette; A. N. Caruso; M. Mäntymäki; J. Hämäläinen; M. Ritala; K. B. Klepper; V. Miikkulainen; O. Nilsen; W. Tenhaeff; N. Dudney; D. Koh; S. K. Banerjee; E. Mays; J. Bielefeld; S. W. King

doi:10.1016/j.nimb.2015.10.052

Nuclear reaction analysis for H, Li, Be, B, C, N, O and F with an RBS check

W. A. Lanford^*, M. Parenti, B. J. Nordell, M. M. Paquette, A. N. Caruso, M. Mäntymäki, J. Hämäläinen, M. Ritala, K. B. Klepper, V. Miikkulainen, O. Nilsen, W. Tenhaeff, N. Dudney, D. Koh, S. K. Banerjee, E. Mays, J. Bielefeld, S. W. King

^*Corresponding author for this work

Not published at Aalto University

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Abstract

¹⁵N nuclear reaction analysis (NRA) for H is combined with 1.2 MeV deuteron (D) NRA which provides a simultaneous analysis for Li, Be, B, C, N, O and F. The energy dependence of the D NRA has been measured and used to correct for the D energy loss in film being analyzed. A 2 MeV He RBS measurement is made. Film composition is determined by a self-consistent analysis of the light element NRA data combined with an RBS analysis for heavy elements. This composition is used to simulate, with no adjustable parameters, the complete RBS spectrum. Comparison of this simulated RBS spectrum with the measured spectrum provides a powerful check of the analysis.

Original language	English
Pages (from-to)	211-215
Number of pages	5
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	371
DOIs	https://doi.org/10.1016/j.nimb.2015.10.052
Publication status	Published - 15 Mar 2016
MoE publication type	A1 Journal article-refereed

Keywords

Electronic materials
Light elements
NRA

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10.1016/j.nimb.2015.10.052

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Lanford, W. A., Parenti, M., Nordell, B. J., Paquette, M. M., Caruso, A. N., Mäntymäki, M., Hämäläinen, J., Ritala, M., Klepper, K. B., Miikkulainen, V., Nilsen, O., Tenhaeff, W., Dudney, N., Koh, D., Banerjee, S. K., Mays, E., Bielefeld, J., & King, S. W. (2016). Nuclear reaction analysis for H, Li, Be, B, C, N, O and F with an RBS check. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 371, 211-215. https://doi.org/10.1016/j.nimb.2015.10.052

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title = "Nuclear reaction analysis for H, Li, Be, B, C, N, O and F with an RBS check",

abstract = "15N nuclear reaction analysis (NRA) for H is combined with 1.2 MeV deuteron (D) NRA which provides a simultaneous analysis for Li, Be, B, C, N, O and F. The energy dependence of the D NRA has been measured and used to correct for the D energy loss in film being analyzed. A 2 MeV He RBS measurement is made. Film composition is determined by a self-consistent analysis of the light element NRA data combined with an RBS analysis for heavy elements. This composition is used to simulate, with no adjustable parameters, the complete RBS spectrum. Comparison of this simulated RBS spectrum with the measured spectrum provides a powerful check of the analysis.",

keywords = "Electronic materials, Light elements, NRA",

author = "Lanford, {W. A.} and M. Parenti and Nordell, {B. J.} and Paquette, {M. M.} and Caruso, {A. N.} and M. M{\"a}ntym{\"a}ki and J. H{\"a}m{\"a}l{\"a}inen and M. Ritala and Klepper, {K. B.} and V. Miikkulainen and O. Nilsen and W. Tenhaeff and N. Dudney and D. Koh and Banerjee, {S. K.} and E. Mays and J. Bielefeld and King, {S. W.}",

year = "2016",

month = mar,

day = "15",

doi = "10.1016/j.nimb.2015.10.052",

language = "English",

volume = "371",

pages = "211--215",

journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

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Lanford, WA, Parenti, M, Nordell, BJ, Paquette, MM, Caruso, AN, Mäntymäki, M, Hämäläinen, J, Ritala, M, Klepper, KB, Miikkulainen, V, Nilsen, O, Tenhaeff, W, Dudney, N, Koh, D, Banerjee, SK, Mays, E, Bielefeld, J & King, SW 2016, 'Nuclear reaction analysis for H, Li, Be, B, C, N, O and F with an RBS check', Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, vol. 371, pp. 211-215. https://doi.org/10.1016/j.nimb.2015.10.052

TY - JOUR

T1 - Nuclear reaction analysis for H, Li, Be, B, C, N, O and F with an RBS check

AU - Lanford, W. A.

AU - Parenti, M.

AU - Nordell, B. J.

AU - Paquette, M. M.

AU - Caruso, A. N.

AU - Mäntymäki, M.

AU - Hämäläinen, J.

AU - Ritala, M.

AU - Klepper, K. B.

AU - Miikkulainen, V.

AU - Nilsen, O.

AU - Tenhaeff, W.

AU - Dudney, N.

AU - Koh, D.

AU - Banerjee, S. K.

AU - Mays, E.

AU - Bielefeld, J.

AU - King, S. W.

PY - 2016/3/15

Y1 - 2016/3/15

N2 - 15N nuclear reaction analysis (NRA) for H is combined with 1.2 MeV deuteron (D) NRA which provides a simultaneous analysis for Li, Be, B, C, N, O and F. The energy dependence of the D NRA has been measured and used to correct for the D energy loss in film being analyzed. A 2 MeV He RBS measurement is made. Film composition is determined by a self-consistent analysis of the light element NRA data combined with an RBS analysis for heavy elements. This composition is used to simulate, with no adjustable parameters, the complete RBS spectrum. Comparison of this simulated RBS spectrum with the measured spectrum provides a powerful check of the analysis.

AB - 15N nuclear reaction analysis (NRA) for H is combined with 1.2 MeV deuteron (D) NRA which provides a simultaneous analysis for Li, Be, B, C, N, O and F. The energy dependence of the D NRA has been measured and used to correct for the D energy loss in film being analyzed. A 2 MeV He RBS measurement is made. Film composition is determined by a self-consistent analysis of the light element NRA data combined with an RBS analysis for heavy elements. This composition is used to simulate, with no adjustable parameters, the complete RBS spectrum. Comparison of this simulated RBS spectrum with the measured spectrum provides a powerful check of the analysis.

KW - Electronic materials

KW - Light elements

KW - NRA

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U2 - 10.1016/j.nimb.2015.10.052

DO - 10.1016/j.nimb.2015.10.052

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SN - 0168-583X

VL - 371

SP - 211

EP - 215

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ER -

Nuclear reaction analysis for H, Li, Be, B, C, N, O and F with an RBS check

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