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Novel method for analysing signal errors caused by polygonal approximations in the fabrication of diffractive elements

  • I. Kallioniemi
  • , J. Saarinen
  • , K. Blomstedt
  • , J. Turunen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Original languageEnglish
    Title of host publicationMicro-optical Technologies for Measurement, Sensors, and Microsystems II, München, Saksa, 18.6-20.6.1997
    EditorsO. M. Parriaux, E.-B. Kley, B. Culshaw, M. Breidne
    Place of PublicationWashington
    PublisherSPIE
    Pages223-230
    Publication statusPublished - 1997
    MoE publication typeA4 Conference publication

    Keywords

    • diffractive optics
    • polygon coding
    • scalar diffraction
    • signal errors

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