Novel low-temperature interconnects for 2.5/3D MEMS integration: demonstration and reliability

Fahimeh Emadi, Vesa Vuorinen, Shenyi Liu, Mervi Paulasto-Krockel

Research output: Contribution to journal › Article › Scientific › peer-review

1 Citation (Scopus)

9 Downloads (Pure)

2 results
- Title(descending)

OtaNano
Rissanen, A. (Manager)
Aalto University
Facility/equipment: Facility
OtaNano - Nanomicroscopy Center
Seitsonen, J. (Manager) & Rissanen, A. (Other)
OtaNano
Facility/equipment: Facility