Non-tilting out-of-plane mode high-Q-mechanical silicon oscillator

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Original languageEnglish
Pages (from-to)1848-1853
JournalJournal of Micromechanics and Microengineering
Volume15
Publication statusPublished - 2005
MoE publication typeA1 Journal article-refereed

    Research areas

  • high-Q-mechanical oscillator, microsystems, single-crystal silicon

ID: 4148894