Nonlinear parameters estimation via Zakai filtering in deposition process control

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

2 Citations (Scopus)

Original language	English
Title of host publication	17th IFAC Symposium on System Identification, SYSID 2015
Pages	1124-1129
DOIs	https://doi.org/10.1016/j.ifacol.2015.12.282
Publication status	Published - 2015
MoE publication type	A4 Conference publication
Event	IFAC Symposium on System Identification - Beijing, China Duration: 19 Oct 2015 → 21 Oct 2015 Conference number: 17

Name	IFAC-PapersOnLine
Publisher	International Federation for Automatic Control
ISSN (Print)	1474-6670
ISSN (Electronic)	2405-8963

Conference	IFAC Symposium on System Identification
Abbreviated title	SYSID
Country/Territory	China
City	Beijing
Period	19/10/2015 → 21/10/2015

Access to Document

@inproceedings{f3e81bc6d56d47698f3cfe647ca06dcf,

title = "Nonlinear parameters estimation via Zakai filtering in deposition process control",

author = "Robert Tenno",

year = "2015",

doi = "10.1016/j.ifacol.2015.12.282",

language = "English",

series = "IFAC-PapersOnLine",

publisher = "International Federation for Automatic Control",

pages = "1124--1129",

booktitle = "17th IFAC Symposium on System Identification, SYSID 2015",

note = "IFAC Symposium on System Identification, SYSID ; Conference date: 19-10-2015 Through 21-10-2015",

}

TY - GEN

T1 - Nonlinear parameters estimation via Zakai filtering in deposition process control

AU - Tenno, Robert

N1 - Conference code: 17

PY - 2015

Y1 - 2015

U2 - 10.1016/j.ifacol.2015.12.282

DO - 10.1016/j.ifacol.2015.12.282

M3 - Conference article in proceedings

T3 - IFAC-PapersOnLine

SP - 1124

EP - 1129

BT - 17th IFAC Symposium on System Identification, SYSID 2015

T2 - IFAC Symposium on System Identification

Y2 - 19 October 2015 through 21 October 2015

ER -