Noninvasive Determination of the Statistical Parameters of Random Rough Surfaces

I. Kallioniemi, A. Niinistö, J. Saarinen, A. Friberg

Research output: Working paperProfessional

Original languageEnglish
Place of PublicationStockholm
Pages128
Publication statusPublished - 2000
MoE publication typeD4 Published development or research report or study

Publication series

NameNorthern Optics 2000, Uppsala, Sweden, June 6-8, 2000
PublisherSwedish Optical Society

Keywords

  • optical scatterometry
  • rough surfaces

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