Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry

V. Heikkinen; K. Hanhijärvi; J. Aaltonen; K. Grigoras; I. Kassamakov; S. Franssila; E. Haeggstrom

doi:10.1117/12.906178

Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry

V. Heikkinen
, K. Hanhijärvi
, J. Aaltonen
, K. Grigoras
, I. Kassamakov
, S. Franssila
, E. Haeggstrom

Department of Chemistry and Materials Science

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

2 Citations (Scopus)

Original language	English
Title of host publication	Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI, San Francisco, CA, 23 January 2012 - 24 January 2012
Publisher	SPIE
ISBN (Print)	978-0-8194-8893-0
DOIs	https://doi.org/10.1117/12.906178
Publication status	Published - 2012
MoE publication type	A4 Conference publication

Publication series

Name
ISSN (Print)	0277-786X

Keywords

Infrared
Non Destructive Testing
Scanning White Light Interferometry
Stroboscopic
Supercontinuum

Access to Document

10.1117/12.906178

Cite this

Heikkinen, V., Hanhijärvi, K., Aaltonen, J., Grigoras, K., Kassamakov, I., Franssila, S., & Haeggstrom, E. (2012). Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry. In Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI, San Francisco, CA, 23 January 2012 - 24 January 2012 SPIE. https://doi.org/10.1117/12.906178

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title = "Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry",

keywords = "Infrared, Non Destructive Testing, Scanning White Light Interferometry, Stroboscopic, Supercontinuum, Infrared, Non Destructive Testing, Scanning White Light Interferometry, Stroboscopic, Supercontinuum, Infrared, Non Destructive Testing, Scanning White Light Interferometry, Stroboscopic, Supercontinuum",

author = "V. Heikkinen and K. Hanhij{\"a}rvi and J. Aaltonen and K. Grigoras and I. Kassamakov and S. Franssila and E. Haeggstrom",

year = "2012",

doi = "10.1117/12.906178",

language = "English",

isbn = "978-0-8194-8893-0",

publisher = "SPIE",

booktitle = "Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI, San Francisco, CA, 23 January 2012 - 24 January 2012",

address = "United States",

}

Heikkinen, V, Hanhijärvi, K, Aaltonen, J, Grigoras, K, Kassamakov, I, Franssila, S & Haeggstrom, E 2012, Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry. in Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI, San Francisco, CA, 23 January 2012 - 24 January 2012. SPIE. https://doi.org/10.1117/12.906178

Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry. / Heikkinen, V.; Hanhijärvi, K.; Aaltonen, J. et al.
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI, San Francisco, CA, 23 January 2012 - 24 January 2012. SPIE, 2012.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry

AU - Heikkinen, V.

AU - Hanhijärvi, K.

AU - Aaltonen, J.

AU - Grigoras, K.

AU - Kassamakov, I.

AU - Franssila, S.

AU - Haeggstrom, E.

PY - 2012

Y1 - 2012

KW - Infrared

KW - Non Destructive Testing

KW - Scanning White Light Interferometry

KW - Stroboscopic

KW - Supercontinuum

KW - Infrared

KW - Non Destructive Testing

KW - Scanning White Light Interferometry

KW - Stroboscopic

KW - Supercontinuum

KW - Infrared

KW - Non Destructive Testing

KW - Scanning White Light Interferometry

KW - Stroboscopic

KW - Supercontinuum

UR - http://dx.doi.org/10.1117/12.906178

U2 - 10.1117/12.906178

DO - 10.1117/12.906178

M3 - Conference article in proceedings

SN - 978-0-8194-8893-0

BT - Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI, San Francisco, CA, 23 January 2012 - 24 January 2012

PB - SPIE

ER -

Heikkinen V, Hanhijärvi K, Aaltonen J, Grigoras K, Kassamakov I, Franssila S et al. Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry. In Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI, San Francisco, CA, 23 January 2012 - 24 January 2012. SPIE. 2012 doi: 10.1117/12.906178

Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry

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Keywords

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Cite this

Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry

Publication series

Keywords

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Raw Materials Research Infrastructure

Cite this