Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry

V. Heikkinen, K. Hanhijärvi, J. Aaltonen, K. Grigoras, I. Kassamakov, S. Franssila, E. Haeggstrom

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2 Citations (Scopus)
Original languageEnglish
Title of host publicationReliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI, San Francisco, CA, 23 January 2012 - 24 January 2012
DOIs
Publication statusPublished - 2012
MoE publication typeA4 Article in a conference publication

Publication series

Name
ISSN (Print)0277-786X

Keywords

  • Infrared
  • Non Destructive Testing
  • Scanning White Light Interferometry
  • Stroboscopic
  • Supercontinuum

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