Non-tilting out-of-plane mode high-Q mechanical silicon oscillator as a moving cavity mirror

Ossi Hahtela, Ilkka Tittonen

    Research output: Contribution to journalArticle

    2 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)417-423
    JournalApplied Physics B: Lasers and Optics
    Volume88
    Issue number3
    Publication statusPublished - 2007
    MoE publication typeA1 Journal article-refereed

    Keywords

    • high-Q-mechanical oscillator
    • microsystems

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