Non-destructive 3D measurement of microchannels

Ville Heikkinen; A. Nolvi; I. Kassamakov; K. Grigoras; S. Franssila; E. Haeggstrom

doi:10.1117/12.930080

Non-destructive 3D measurement of microchannels

Ville Heikkinen
, A. Nolvi
, I. Kassamakov
, K. Grigoras
, S. Franssila
, E. Haeggstrom

Department of Chemistry and Materials Science

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI, San Diego, CA, 13 August 2012 - 14 August 2012
Publisher	SPIE
Pages	84660
ISBN (Print)	978-0-8194-9183-1
DOIs	https://doi.org/10.1117/12.930080
Publication status	Published - 2012
MoE publication type	A4 Conference publication

Publication series

Name
ISSN (Print)	0277-786X

Keywords

Microchannels
Multilayer
Scanning white light interferometry

Access to Document

10.1117/12.930080

Cite this

@inproceedings{45da07a3f97348d3be22ae78d702bb25,

title = "Non-destructive 3D measurement of microchannels",

keywords = "Microchannels, Multilayer, Scanning white light interferometry, Microchannels, Multilayer, Scanning white light interferometry, Microchannels, Multilayer, Scanning white light interferometry",

author = "Ville Heikkinen and A. Nolvi and I. Kassamakov and K. Grigoras and S. Franssila and E. Haeggstrom",

year = "2012",

doi = "10.1117/12.930080",

language = "English",

isbn = "978-0-8194-9183-1",

publisher = "SPIE",

pages = "84660",

booktitle = "Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI, San Diego, CA, 13 August 2012 - 14 August 2012",

address = "United States",

}

Non-destructive 3D measurement of microchannels. / Heikkinen, Ville; Nolvi, A.; Kassamakov, I. et al.
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI, San Diego, CA, 13 August 2012 - 14 August 2012. SPIE, 2012. p. 84660.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Non-destructive 3D measurement of microchannels

AU - Heikkinen, Ville

AU - Nolvi, A.

AU - Kassamakov, I.

AU - Grigoras, K.

AU - Franssila, S.

AU - Haeggstrom, E.

PY - 2012

Y1 - 2012

KW - Microchannels

KW - Multilayer

KW - Scanning white light interferometry

KW - Microchannels

KW - Multilayer

KW - Scanning white light interferometry

KW - Microchannels

KW - Multilayer

KW - Scanning white light interferometry

UR - http://dx.doi.org/10.1117/12.930080

U2 - 10.1117/12.930080

DO - 10.1117/12.930080

M3 - Conference article in proceedings

SN - 978-0-8194-9183-1

SP - 84660

BT - Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI, San Diego, CA, 13 August 2012 - 14 August 2012

PB - SPIE

ER -

Non-destructive 3D measurement of microchannels

Publication series

Keywords

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Raw Materials Research Infrastructure

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Non-destructive 3D measurement of microchannels

Publication series

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Raw Materials Research Infrastructure

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