Neural analysis of integrated circuit yield dependence on CMOS process control parameters

Mika Karilahti

    Research output: Contribution to journalArticleScientificpeer-review

    1 Citation (Scopus)
    Original languageEnglish
    Pages (from-to)00-00
    JournalMicroelectronics Reliability
    Issue number00
    Publication statusPublished - 2002
    MoE publication typeA1 Journal article-refereed

    Keywords

    • semiconductors
    • synchrotron X-ray topography

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