Neodymium oxide and neodymium aluminate thin films by atomic layer deposition

Anne Kosola; Jani Päiväsaari; Matti Putkonen; Lauri Niinistö

Neodymium oxide and neodymium aluminate thin films by atomic layer deposition

Anne Kosola, Jani Päiväsaari, Matti Putkonen, Lauri Niinistö

Research output: Contribution to journal › Article › Scientific › peer-review

54 Citations (Scopus)

Original language	English
Pages (from-to)	152-159
Journal	Thin Solid Films
Volume	479
Issue number	1-2
Publication status	Published - 2005
MoE publication type	A1 Journal article-refereed

Keywords

ALD
atomic layer deposition
neodymium oxide

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title = "Neodymium oxide and neodymium aluminate thin films by atomic layer deposition",

keywords = "ALD, atomic layer deposition, neodymium oxide, ALD, atomic layer deposition, neodymium oxide, ALD, atomic layer deposition, neodymium oxide",

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T1 - Neodymium oxide and neodymium aluminate thin films by atomic layer deposition

AU - Kosola, Anne

AU - Päiväsaari, Jani

AU - Putkonen, Matti

AU - Niinistö, Lauri

PY - 2005

Y1 - 2005

KW - ALD

KW - atomic layer deposition

KW - neodymium oxide

KW - ALD

KW - atomic layer deposition

KW - neodymium oxide

KW - ALD

KW - atomic layer deposition

KW - neodymium oxide

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M3 - Article

VL - 479

SP - 152

EP - 159

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

IS - 1-2

ER -

Neodymium oxide and neodymium aluminate thin films by atomic layer deposition

Keywords

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