Original language | English |
---|---|
Pages (from-to) | 152-159 |
Journal | Thin Solid Films |
Volume | 479 |
Issue number | 1-2 |
Publication status | Published - 2005 |
MoE publication type | A1 Journal article-refereed |
Keywords
- ALD
- atomic layer deposition
- neodymium oxide
Anne Kosola, Jani Päiväsaari, Matti Putkonen, Lauri Niinistö
Research output: Contribution to journal › Article › Scientific › peer-review
Original language | English |
---|---|
Pages (from-to) | 152-159 |
Journal | Thin Solid Films |
Volume | 479 |
Issue number | 1-2 |
Publication status | Published - 2005 |
MoE publication type | A1 Journal article-refereed |