Nanostructures by Atomic Layer Deposition: Controlling and Combining Materials at Atomic and Molecular Level

Lauri Niinistö, Matti Putkonen, Pia Myllymäki, Eero Iiskola

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Original languageEnglish
    Title of host publicationEuropean Science Foundation workshop, Nanowires: Bridging the gap between Material Science and Biology, Bad Hofgastein, Austria 26. - 28. May 2005
    Publication statusPublished - 2005
    MoE publication typeA4 Conference publication

    Keywords

    • Atomic layer deposition
    • oxide thin films
    • porous membranes

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