Nanostructure fabrication process for optoelectronic application

A. Malinin, V. Ovchinnikov, T. Toivola, C. Tuovinen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationSPIE's 45th Annual Meeting, The International Symposium on Optical Science and Technology, San Diego, CA, USA, 29.7.-3.8.2000
EditorsD.L. Andrews, T. Asakura, S. Jutamulia, W. Kirk, M.G. Lagally, R.B. Lal, J.D. Trolinger
Pages65-75
Publication statusPublished - 2000
MoE publication typeA4 Article in a conference publication

Keywords

  • nanopillars
  • nanostructures
  • self-organised mask
  • silicon

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