Nanoscale patterning of silicon with focused ion beam and anisotropic wer etching

Päivi Sievilä, Nikolai Chekurov, Ilkka Tittonen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Physics Days, Jyväskylä, 11-13 March, Finland
Place of Publication	Jyväskylä
Publisher	Finnish Physical Society
Publication status	Published - 2010
MoE publication type	A4 Conference publication

Name
Publisher	The Finnish Physical Society
ISSN (Print)	0075-465X

Keywords

@inproceedings{46f976fb1054466f89e9851ea4fab991,

title = "Nanoscale patterning of silicon with focused ion beam and anisotropic wer etching",

keywords = "focused ion beam, TMAH, focused ion beam, TMAH, focused ion beam, TMAH",

author = "P{\"a}ivi Sievil{\"a} and Nikolai Chekurov and Ilkka Tittonen",

year = "2010",

language = "English",

publisher = "Finnish Physical Society",

booktitle = "Physics Days, Jyv{\"a}skyl{\"a}, 11-13 March, Finland",

address = "Finland",

}

TY - GEN

T1 - Nanoscale patterning of silicon with focused ion beam and anisotropic wer etching

AU - Sievilä, Päivi

AU - Chekurov, Nikolai

AU - Tittonen, Ilkka

PY - 2010

Y1 - 2010

KW - focused ion beam

KW - TMAH

KW - focused ion beam

KW - TMAH

KW - focused ion beam

KW - TMAH

M3 - Conference article in proceedings

BT - Physics Days, Jyväskylä, 11-13 March, Finland

PB - Finnish Physical Society

CY - Jyväskylä

ER -