Nanoscale Metal-Semiconductor-Metal Photodetectors fabricated on SOI-substrates

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

3 Citations (Scopus)

Original language	English
Title of host publication	1998 IEEE International SOI Conference, Stuart, Florida, USA, Oct 5-8 1998
Place of Publication	USA
Pages	77-78
Publication status	Published - 1998
MoE publication type	A4 Conference publication

Keywords

@inproceedings{77d230e298c04c698bc4c13d3bd640ab,

title = "Nanoscale Metal-Semiconductor-Metal Photodetectors fabricated on SOI-substrates",

keywords = "photodetectors, SOI-substrates, photodetectors, SOI-substrates, photodetectors, SOI-substrates",

author = "K. Honkanen and N. Hakkarainen and P. Kuivalainen",

year = "1998",

language = "English",

pages = "77--78",

booktitle = "1998 IEEE International SOI Conference, Stuart, Florida, USA, Oct 5-8 1998",

}

TY - GEN

T1 - Nanoscale Metal-Semiconductor-Metal Photodetectors fabricated on SOI-substrates

AU - Honkanen, K.

AU - Hakkarainen, N.

AU - Kuivalainen, P.

PY - 1998

Y1 - 1998

KW - photodetectors

KW - SOI-substrates

KW - photodetectors

KW - SOI-substrates

KW - photodetectors

KW - SOI-substrates

M3 - Conference article in proceedings

SP - 77

EP - 78

BT - 1998 IEEE International SOI Conference, Stuart, Florida, USA, Oct 5-8 1998

CY - USA

ER -