Nanoporous Metal-Organic Framework Thin Films Prepared Directly from Gaseous Precursors by Atomic and Molecular Layer Deposition: Implications for Microelectronics

Jenna Multia, Dmitry E. Kravchenko, Víctor Rubio-Giménez, Anish Philip, Rob Ameloot*, Maarit Karppinen*

*Corresponding author for this work

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  • Finished

    FlagShip PREIN

    Mäkelä, K.

    01/01/201931/12/2022

    Project: Academy of Finland: Other research funding

  • HYCOAT (MSCA- ITN)

    Karppinen, M., Ghiyasi, R., Revitzer, H. & Lepikko, S.

    01/01/201830/06/2022

    Project: EU: MC