Nanoporous Metal-Organic Framework Thin Films Prepared Directly from Gaseous Precursors by Atomic and Molecular Layer Deposition: Implications for Microelectronics

Jenna Multia, Dmitry E. Kravchenko, Víctor Rubio-Giménez, Anish Philip, Rob Ameloot^*, Maarit Karppinen^*

^*Corresponding author for this work

KU Leuven

Research output: Contribution to journal › Article › Scientific › peer-review

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Raw Materials Research Infrastructure
Maarit Karppinen (Manager)
School of Chemical Engineering
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