Nanoporous Metal-Organic Framework Thin Films Prepared Directly from Gaseous Precursors by Atomic and Molecular Layer Deposition: Implications for Microelectronics

Jenna Multia; Dmitry E. Kravchenko; Víctor Rubio-Giménez; Anish Philip; Rob Ameloot; Maarit Karppinen

doi:10.1021/acsanm.2c04934

Nanoporous Metal-Organic Framework Thin Films Prepared Directly from Gaseous Precursors by Atomic and Molecular Layer Deposition: Implications for Microelectronics

Jenna Multia, Dmitry E. Kravchenko, Víctor Rubio-Giménez, Anish Philip, Rob Ameloot^*, Maarit Karppinen^*

^*Corresponding author for this work

KU Leuven

Research output: Contribution to journal › Article › Scientific › peer-review

8 Citations (Scopus)

205 Downloads (Pure)

Abstract

Atomic/molecular layer deposition (ALD/MLD) allows for the direct gas-phase synthesis of crystalline metal-organic framework (MOF) thin films. Here, we show for the first time using krypton and methanol physisorption measurements that ALD/MLD-fabricated copper 1,4-benzenedicarboxylate (Cu-BDC) ultrathin films possess accessible porosity matching that of the corresponding bulk MOF.

Original language	English
Pages (from-to)	827-831
Number of pages	5
Journal	ACS Applied Nano Materials
Volume	6
Issue number	2
Early online date	10 Jan 2023
DOIs	https://doi.org/10.1021/acsanm.2c04934
Publication status	Published - 27 Jan 2023
MoE publication type	A1 Journal article-refereed

Keywords

atomic layer deposition
krypton physisorption
metal-organic framework
methanol physisorption
molecular layer deposition
porous thin films

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10.1021/acsanm.2c04934Licence: CC BY

CHEM_Multia_et_al_Nanoporous_Metal-Organic_2023_ACS_Applied_Nano_MaterialsFinal published version, 3.2 MBLicence: CC BY

Cite this

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title = "Nanoporous Metal-Organic Framework Thin Films Prepared Directly from Gaseous Precursors by Atomic and Molecular Layer Deposition: Implications for Microelectronics",

abstract = "Atomic/molecular layer deposition (ALD/MLD) allows for the direct gas-phase synthesis of crystalline metal-organic framework (MOF) thin films. Here, we show for the first time using krypton and methanol physisorption measurements that ALD/MLD-fabricated copper 1,4-benzenedicarboxylate (Cu-BDC) ultrathin films possess accessible porosity matching that of the corresponding bulk MOF.",

keywords = "atomic layer deposition, krypton physisorption, metal-organic framework, methanol physisorption, molecular layer deposition, porous thin films",

author = "Jenna Multia and Kravchenko, {Dmitry E.} and V{\'i}ctor Rubio-Gim{\'e}nez and Anish Philip and Rob Ameloot and Maarit Karppinen",

note = "Funding Information: This project has received funding from the European Union{\textquoteright}s Horizon 2020 research and innovation program under Marie Sk{\l}odowska-Curie Grant Agreement 765378 and from Academy of Finland (PREIN). V.R.-G. thanks the Research Foundation Flanders for a Junior Postdoctoral Fellowship (1263622N). The research leading to this result has been supported by the project CALIPSOplus under Grant Agreement 730872 from the EU Framework Programme for Research and Innovation Horizon 2020. We acknowledge the use of the RawMatters Finland Infrastructure at Aalto University as well as Elettra Sincrotrone Trieste for providing access to its synchrotron radiation facilities (Proposal 20210538) and thank Luisa Barba and Nicola Demitri for assistance using beamline XRD1. We thank Prof. Roland Resel for assistance in using GIDVis software. Publisher Copyright: {\textcopyright} 2023 The Authors. Published by American Chemical Society.",

year = "2023",

month = jan,

day = "27",

doi = "10.1021/acsanm.2c04934",

language = "English",

volume = "6",

pages = "827--831",

journal = "ACS Applied Nano Materials",

issn = "2574-0970",

publisher = "American Chemical Society",

number = "2",

}

Nanoporous Metal-Organic Framework Thin Films Prepared Directly from Gaseous Precursors by Atomic and Molecular Layer Deposition: Implications for Microelectronics. / Multia, Jenna; Kravchenko, Dmitry E.; Rubio-Giménez, Víctor et al.
In: ACS Applied Nano Materials, Vol. 6, No. 2, 27.01.2023, p. 827-831.

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Nanoporous Metal-Organic Framework Thin Films Prepared Directly from Gaseous Precursors by Atomic and Molecular Layer Deposition: Implications for Microelectronics

AU - Multia, Jenna

AU - Kravchenko, Dmitry E.

AU - Rubio-Giménez, Víctor

AU - Philip, Anish

AU - Ameloot, Rob

AU - Karppinen, Maarit

N1 - Funding Information: This project has received funding from the European Union’s Horizon 2020 research and innovation program under Marie Skłodowska-Curie Grant Agreement 765378 and from Academy of Finland (PREIN). V.R.-G. thanks the Research Foundation Flanders for a Junior Postdoctoral Fellowship (1263622N). The research leading to this result has been supported by the project CALIPSOplus under Grant Agreement 730872 from the EU Framework Programme for Research and Innovation Horizon 2020. We acknowledge the use of the RawMatters Finland Infrastructure at Aalto University as well as Elettra Sincrotrone Trieste for providing access to its synchrotron radiation facilities (Proposal 20210538) and thank Luisa Barba and Nicola Demitri for assistance using beamline XRD1. We thank Prof. Roland Resel for assistance in using GIDVis software. Publisher Copyright: © 2023 The Authors. Published by American Chemical Society.

PY - 2023/1/27

Y1 - 2023/1/27

N2 - Atomic/molecular layer deposition (ALD/MLD) allows for the direct gas-phase synthesis of crystalline metal-organic framework (MOF) thin films. Here, we show for the first time using krypton and methanol physisorption measurements that ALD/MLD-fabricated copper 1,4-benzenedicarboxylate (Cu-BDC) ultrathin films possess accessible porosity matching that of the corresponding bulk MOF.

AB - Atomic/molecular layer deposition (ALD/MLD) allows for the direct gas-phase synthesis of crystalline metal-organic framework (MOF) thin films. Here, we show for the first time using krypton and methanol physisorption measurements that ALD/MLD-fabricated copper 1,4-benzenedicarboxylate (Cu-BDC) ultrathin films possess accessible porosity matching that of the corresponding bulk MOF.

KW - atomic layer deposition

KW - krypton physisorption

KW - metal-organic framework

KW - methanol physisorption

KW - molecular layer deposition

KW - porous thin films

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VL - 6

SP - 827

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JF - ACS Applied Nano Materials

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ER -

Nanoporous Metal-Organic Framework Thin Films Prepared Directly from Gaseous Precursors by Atomic and Molecular Layer Deposition: Implications for Microelectronics

Abstract

Keywords

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PREIN: Photonics Research and Innovation

HYCOAT: A European Training Network for Functional Hybrid Coatings by Molecular Layer Deposition

Raw Materials Research Infrastructure

Cite this

Nanoporous Metal-Organic Framework Thin Films Prepared Directly from Gaseous Precursors by Atomic and Molecular Layer Deposition: Implications for Microelectronics

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Projects

PREIN: Photonics Research and Innovation

HYCOAT: A European Training Network for Functional Hybrid Coatings by Molecular Layer Deposition

Equipment

Raw Materials Research Infrastructure

Cite this