Nanoperforated silicon membranes fabricated by UV-nanoimprint lithography, deep reactive ion etching and atomic layer deposition

Research output: Contribution to journalArticleScientificpeer-review


  • Lauri Sainiemi
  • Jukka Viheriälä
  • Tiina Sikanen
  • Janne Laukkanen
  • Tapio Niemi

Research units


Original languageEnglish
Pages (from-to)077001
JournalJournal of Micromechanics and Microengineering
Issue number7
Publication statusPublished - 2010
MoE publication typeA1 Journal article-refereed

    Research areas

  • chemical physics, electronics and devices, interfaces and thin films, physical chemistry, plasma physics, surfaces

ID: 896631