Nanoperforated silicon membranes fabricated by UV-nanoimprint lithography, deep reactive ion etching and atomic layer deposition

Lauri Sainiemi, Jukka Viheriälä, Tiina Sikanen, Janne Laukkanen, Tapio Niemi

Research output: Contribution to journalArticleScientificpeer-review

18 Citations (Scopus)
Original languageEnglish
Pages (from-to)077001
JournalJournal of Micromechanics and Microengineering
Volume20
Issue number7
DOIs
Publication statusPublished - 2010
MoE publication typeA1 Journal article-refereed

Keywords

  • chemical physics
  • electronics and devices
  • interfaces and thin films
  • physical chemistry
  • plasma physics
  • surfaces

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