Nanomechanical Resonators for Cryogenic Research
Research output: Contribution to journal › Article › Scientific › peer-review
Suspended aluminum nanoelectromechanical resonators have been fabricated, and the manufacturing process is described in this work. Device motion is driven and detected with a magnetomotive method. The resonance response has been measured at 4.2 K temperature in vacuum and low-pressure 4He gas. At low oscillation amplitudes, the resonance response is linear, producing Lorentzian line shapes, and Q values up to 4400 have been achieved. At higher oscillation amplitudes, the devices show nonlinear Duffing-like behavior. The devices are found to be extremely sensitive to pressure in 4He gas. Such device is a promising tool for studying properties of superfluid helium.
|Number of pages||10|
|Journal||Journal of Low Temperature Physics|
|Publication status||Published - 17 Dec 2018|
|MoE publication type||A1 Journal article-refereed|
- He, NEMS, Quantized vortices, Sensors