Nanomechanical Resonators for Cryogenic Research

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Suspended aluminum nanoelectromechanical resonators have been fabricated, and the manufacturing process is described in this work. Device motion is driven and detected with a magnetomotive method. The resonance response has been measured at 4.2 K temperature in vacuum and low-pressure 4He gas. At low oscillation amplitudes, the resonance response is linear, producing Lorentzian line shapes, and Q values up to 4400 have been achieved. At higher oscillation amplitudes, the devices show nonlinear Duffing-like behavior. The devices are found to be extremely sensitive to pressure in 4He gas. Such device is a promising tool for studying properties of superfluid helium.


Original languageEnglish
Number of pages10
JournalJournal of Low Temperature Physics
Publication statusPublished - 17 Dec 2018
MoE publication typeA1 Journal article-refereed

    Research areas

  • He, NEMS, Quantized vortices, Sensors

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