Nanomaterials for advanced applications through atomic layer deposition and precursor design

Lauri Niinistö, Matti Putkonen, Mato Knez, Kornelius Nielsch

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publication1st European Chemistry Congress, Budapest, Hungary, 27-31 August 2006,
    Pages149
    Publication statusPublished - 2006
    MoE publication typeA4 Article in a conference publication

    Keywords

    • atomic layer deposition; nanomaterials; high-k oxides

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