Nanolaminate structures fabricated by ALD for reducing propagation losses and enhancing the third-order optical nonlinearities

Lasse Karvonen; Tapani Alasaarela; Henri Jussila; Soroush Mehravar; Ya Chen; Antti Säynätjoki; Robert A. Norwood; Nasser Peyghambarian; Khanh Kieu; Seppo Honkanen; Harri Lipsanen

doi:10.1117/12.2045006

Nanolaminate structures fabricated by ALD for reducing propagation losses and enhancing the third-order optical nonlinearities

Lasse Karvonen, Tapani Alasaarela, Henri Jussila, Soroush Mehravar, Ya Chen, Antti Säynätjoki, Robert A. Norwood, Nasser Peyghambarian, Khanh Kieu, Seppo Honkanen, Harri Lipsanen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

7 Citations (Scopus)

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Abstract

We demonstrate a novel atomic layer deposition (ALD) process to make high quality nanocrystalline titanium dioxide (TiO₂) and zinc oxide (ZnO) with intermediate Al₂O₃ layers to limit the crystal size. The waveguide losses of TiO₂/Al₂O₃ nanolaminates measured using the prism coupling method for both 633 nm and 1551 nm wavelengths are as low as 0.2 ± 0.1 dB/mm with the smallest crystal size. We also show that the third-order optical nonlinearity in ZnO/Al ₂O₃ nanolaminates can be enhanced by nanoscale engineering of the thin film structure.

Original language	English
Title of host publication	Optical Components and Materials XI
Editors	MJF Digonnet, S Jiang
Pages	1-9
Number of pages	9
DOIs	https://doi.org/10.1117/12.2045006
Publication status	Published - 2014
MoE publication type	A4 Article in a conference publication
Event	Optical Components and Materials - San Francisco, United States Duration: 3 Feb 2014 → 5 Feb 2014 Conference number: 11

Publication series

Name	PRoceedings of SPIE
Publisher	SPIE
Volume	8982
ISSN (Print)	0277-786X

Conference

Conference	Optical Components and Materials
Country	United States
City	San Francisco
Period	03/02/2014 → 05/02/2014

Keywords

Atomic layer deposition
Loss
Third-order optical nonlinearity

Access to Document

10.1117/12.2045006

89820OFinal published version, 664 KB

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Karvonen, L., Alasaarela, T., Jussila, H., Mehravar, S., Chen, Y., Säynätjoki, A., Norwood, R. A., Peyghambarian, N., Kieu, K., Honkanen, S., & Lipsanen, H. (2014). Nanolaminate structures fabricated by ALD for reducing propagation losses and enhancing the third-order optical nonlinearities. In MJF. Digonnet, & S. Jiang (Eds.), Optical Components and Materials XI (pp. 1-9). [89820O] (PRoceedings of SPIE; Vol. 8982). https://doi.org/10.1117/12.2045006

Karvonen, Lasse ; Alasaarela, Tapani ; Jussila, Henri ; Mehravar, Soroush ; Chen, Ya ; Säynätjoki, Antti ; Norwood, Robert A. ; Peyghambarian, Nasser ; Kieu, Khanh ; Honkanen, Seppo ; Lipsanen, Harri. / Nanolaminate structures fabricated by ALD for reducing propagation losses and enhancing the third-order optical nonlinearities. Optical Components and Materials XI. editor / MJF Digonnet ; S Jiang. 2014. pp. 1-9 (PRoceedings of SPIE).

@inproceedings{a1095caabf7c441c97d1b0783cf2b69f,

title = "Nanolaminate structures fabricated by ALD for reducing propagation losses and enhancing the third-order optical nonlinearities",

abstract = "We demonstrate a novel atomic layer deposition (ALD) process to make high quality nanocrystalline titanium dioxide (TiO2) and zinc oxide (ZnO) with intermediate Al2O3 layers to limit the crystal size. The waveguide losses of TiO2/Al2O3 nanolaminates measured using the prism coupling method for both 633 nm and 1551 nm wavelengths are as low as 0.2 ± 0.1 dB/mm with the smallest crystal size. We also show that the third-order optical nonlinearity in ZnO/Al 2O3 nanolaminates can be enhanced by nanoscale engineering of the thin film structure.",

keywords = "Atomic layer deposition, Loss, Third-order optical nonlinearity",

author = "Lasse Karvonen and Tapani Alasaarela and Henri Jussila and Soroush Mehravar and Ya Chen and Antti S{\"a}yn{\"a}tjoki and Norwood, {Robert A.} and Nasser Peyghambarian and Khanh Kieu and Seppo Honkanen and Harri Lipsanen",

year = "2014",

doi = "10.1117/12.2045006",

language = "English",

isbn = "9780819498953",

series = "PRoceedings of SPIE",

publisher = "SPIE",

pages = "1--9",

editor = "MJF Digonnet and S Jiang",

booktitle = "Optical Components and Materials XI",

note = "Optical Components and Materials ; Conference date: 03-02-2014 Through 05-02-2014",

}

Karvonen, L, Alasaarela, T, Jussila, H, Mehravar, S, Chen, Y, Säynätjoki, A, Norwood, RA, Peyghambarian, N, Kieu, K, Honkanen, S & Lipsanen, H 2014, Nanolaminate structures fabricated by ALD for reducing propagation losses and enhancing the third-order optical nonlinearities. in MJF Digonnet & S Jiang (eds), Optical Components and Materials XI., 89820O, PRoceedings of SPIE, vol. 8982, pp. 1-9, Optical Components and Materials, San Francisco, United States, 03/02/2014. https://doi.org/10.1117/12.2045006

Nanolaminate structures fabricated by ALD for reducing propagation losses and enhancing the third-order optical nonlinearities. / Karvonen, Lasse; Alasaarela, Tapani; Jussila, Henri; Mehravar, Soroush; Chen, Ya; Säynätjoki, Antti; Norwood, Robert A.; Peyghambarian, Nasser; Kieu, Khanh; Honkanen, Seppo; Lipsanen, Harri.

Optical Components and Materials XI. ed. / MJF Digonnet; S Jiang. 2014. p. 1-9 89820O (PRoceedings of SPIE; Vol. 8982).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

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T1 - Nanolaminate structures fabricated by ALD for reducing propagation losses and enhancing the third-order optical nonlinearities

AU - Karvonen, Lasse

AU - Alasaarela, Tapani

AU - Jussila, Henri

AU - Mehravar, Soroush

AU - Chen, Ya

AU - Säynätjoki, Antti

AU - Norwood, Robert A.

AU - Peyghambarian, Nasser

AU - Kieu, Khanh

AU - Honkanen, Seppo

AU - Lipsanen, Harri

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N2 - We demonstrate a novel atomic layer deposition (ALD) process to make high quality nanocrystalline titanium dioxide (TiO2) and zinc oxide (ZnO) with intermediate Al2O3 layers to limit the crystal size. The waveguide losses of TiO2/Al2O3 nanolaminates measured using the prism coupling method for both 633 nm and 1551 nm wavelengths are as low as 0.2 ± 0.1 dB/mm with the smallest crystal size. We also show that the third-order optical nonlinearity in ZnO/Al 2O3 nanolaminates can be enhanced by nanoscale engineering of the thin film structure.

AB - We demonstrate a novel atomic layer deposition (ALD) process to make high quality nanocrystalline titanium dioxide (TiO2) and zinc oxide (ZnO) with intermediate Al2O3 layers to limit the crystal size. The waveguide losses of TiO2/Al2O3 nanolaminates measured using the prism coupling method for both 633 nm and 1551 nm wavelengths are as low as 0.2 ± 0.1 dB/mm with the smallest crystal size. We also show that the third-order optical nonlinearity in ZnO/Al 2O3 nanolaminates can be enhanced by nanoscale engineering of the thin film structure.

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BT - Optical Components and Materials XI

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T2 - Optical Components and Materials

Y2 - 3 February 2014 through 5 February 2014

ER -

Nanolaminate structures fabricated by ALD for reducing propagation losses and enhancing the third-order optical nonlinearities

Abstract

Publication series

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Keywords

Access to Document

OtaNano

Raw Materials Research Infrastructure

Cite this