Nanoidentation of silicon surfaces: Molecular-dynamics simulations of atomic force microscopy

R. Astala, M. Kaukonen, R.M. Nieminen, T. Heine

Research output: Contribution to journalArticleScientificpeer-review

36 Citations (Scopus)
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Abstract

We investigate the atomic-scale details of atomic force microscopy through a quasistatic molecular dynamics simulation together with a density-functional-based tight-binding method. The changes in the AFM tip shape, the size of the tip-sample contact area, as well as the microscopic hardness and Young’s moduli of silicon {111},{110},{100} surfaces are studied. Furthermore, the effects of hydrogen termination of the surface and of subsurface vacancies on hardness and Young’s modulus are discussed.
Original languageEnglish
Pages (from-to)2973-2980
JournalPhysical Review B
Volume61
Issue number4
DOIs
Publication statusPublished - 2000
MoE publication typeA1 Journal article-refereed

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