@inproceedings{0e5b6b63513841d2aa00f040a8828e67,
title = "Nanofabrication of saw impedance element filters for 5 GHz and beyond",
keywords = "7.5-10 GHz, SAW, surface acoustic waves, 7.5-10 GHz, SAW, surface acoustic waves, 7.5-10 GHz, SAW, surface acoustic waves",
author = "S. Lehtonen and V.P. Plessky and M.T. Honkanen and V. Ovchinnikov and Jari Turunen and Salomaa, {Martti M.}",
year = "2000",
language = "English",
pages = "5",
editor = "M. Kaivola and E. Noponen",
booktitle = "The XXXIV Annual Conference of the Finnish Physical Society, Espoo, March 9-11, 2000",
publisher = "Helsinki University of Technology",
address = "Finland",
}