Nanofabrication of saw impedance element filters for 5 GHz and beyond

S. Lehtonen, V.P. Plessky, M.T. Honkanen, V. Ovchinnikov, Jari Turunen, Martti M. Salomaa

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationThe XXXIV Annual Conference of the Finnish Physical Society, Espoo, March 9-11, 2000
    EditorsM. Kaivola, E. Noponen
    Place of PublicationEspoo
    PublisherHelsinki University of Technology
    Pages5
    Publication statusPublished - 2000
    MoE publication typeA4 Article in a conference publication

    Keywords

    • 7.5-10 GHz
    • SAW
    • surface acoustic waves

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