Multilevel grating array illuminators manufactured by electron-beam lithography

Mats Ekberg, M. Larsson, S. Hård, Jari Turunen, M. Taghizadeh, Jan Westerholm, Antti Vasara

Research output: Contribution to journalArticleScientificpeer-review

26 Citations (Scopus)
Original languageEnglish
Pages (from-to)37-41
JournalOptics Communications
Volume88
Publication statusPublished - 1992
MoE publication typeA1 Journal article-refereed

Keywords

  • diffraction
  • gratings

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