MOVPE growth of N-polar AlN on 4H-SiC: Effect of substrate miscut on layer quality

J. Lemettinen*, H. Okumura, I. Kim, C. Kauppinen, T. Palacios, S. Suihkonen

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

24 Citations (Scopus)
95 Downloads (Pure)
Filter
Finished

Search results