MOVPE growth of N-polar AlN on 4H-SiC: Effect of substrate miscut on layer quality

J. Lemettinen*, H. Okumura, I. Kim, C. Kauppinen, T. Palacios, S. Suihkonen

*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

12 Citations (Scopus)
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